Metamaterials, artificially structured nanomaterials, have enabled unprecedented phenomena such as negative refraction. However, despite the great and promising science, making practical devices based on metamaterials have been one of the most important issues due to the difficulty in fabrication. In this abstract, I will discuss recent development of hierarchical fabricati on techniques for scalable large scale and three dimensional nanofabrication efforts to make practical metamaterials based devices. The first example is realizing a super resolution imaging device called hyperlens in wafer scale for high throughput real ti me imaging . With proposed hyperlens array, we show the first bio sample imaging experimental result of super resolution imaging on hyperlenses by combining to conventional microscopy system for imaging biomolecules. Hippocampal neuron cells are imaged by v isible light through the hyperlens array with resolution down to 150 nm, beyond the diffraction limit. The second example is the continuous to build reliable truly nanoscale 3D fabrication process based on ultra accurate and precise electron beam lithograp hy overlay. The examples include 3D bulk negative index metamaterials, chiral metamaterials in optical frequencies and so on. Also, the recent effort of bottom up approach using nanoparticles and self assembled materials for isotropic 3D metamaterials will be discussed as a new direction of nanofabrication. Such unique fabrication techniques mentioned in this talk will provide the opportunity to achieve practical metamaterial devices as the significant step making nanoscience to nanotechnology.