[정건욱(박사), 이근동(학생), 이규철(교수)] 마이크로 패턴화된 중간층 그래핀을 이용한, 텅스텐-메탈 전극 위에 직접 성장시킨 GaN 마이크로 구조의 LEDs (Nano Energy 저널 게재)
We report on the selective-area growth of GaN microstructures on tungsten (W)-metal electrodes using a micro-patterned graphene intermediate layer between GaN and W, and demonstrate their use as light-emitting diodes (LEDs). Prior to the GaN growths, the cm-scale graphene layer was transferred on W and then further patterned into a regular array of few-μm-sized graphene microdots using conventional lithography. The graphene microdots served as a seed layer for selectively growing crack-free GaN microstructures with regular diameter and spacing. Each microstructure displayed a microdisk morphology, exhibiting a single crystalline phase from epitaxial lateral overgrowth (ELOG). We observed ohmic behavior between the as-grown GaN microdisks and underlying W film, facilitating the fabrication of LED microarrays. Using the underlying W layer as an ohmic contact, we fabricated p-n junction GaN microdisk LEDs, consisting of three periods of InxGa1–xN/GaN multiple quantum wells. Uniform electroluminescence was observed across the microdisks. These results open up novel strategies for streamlined fabrication of high-performance and high-resolution LEDs.
Authors: Kunook Chung a, Keundong Lee b, Youngbin Tchoe b, Hongseok Oh b, JunBeom Park b, Jerome K. Hyun c, Gyu-Chul
Journal: Nano Energy, Volume 60, Pages 82-86 (June 2019)